(x/y/z) = (5/5/1) µm
(y/y/z) = (1.2/1.2 /0.3) µm
( X / Y / Z) = ( 2 / 2 / 5 ) mm
Load Lock Chamber, Preparation Chamber, STM Chamber
multi-stage vibartion isolation from cry cooler
below 1.3 x 10-8Pa ( 1.3 x 10-10mBar )
Load Lock 5 x 10-5Pa ( 5 x 10-7mBar )
E-Beam Heating for sample and tip
Argon Ion Sputter Source
Metal and Organic Deposition Sources