nanoscore tech GmbH

Dry-Cooled UHV LT SPM

Dry-Cooled UHV LT SPM

Features:

  • Dry-Cooled / no LHe or LN2 needed
  • 5K at sample, proven by SC gap
  • high staibilty, low drift
  • High resolution STM & AFM
  • Optical access by fibre or lens stage
  • In-situ deposition of metals or organic materials

STM

Scan Range at RT

(x/y/z) = (5/5/1) µm

Scan Range at 5K

(y/y/z) = (1.2/1.2 /0.3) µm

Coarse Range

( X / Y / Z) = ( 2 / 2 / 5 ) mm

UHV System

Load Lock Chamber, Preparation Chamber, STM Chamber

multi-stage vibartion isolation from cry cooler

Base Pressure

below 1.3 x 10-8Pa ( 1.3 x 10-10mBar )
Load Lock 5 x 10-5Pa ( 5 x 10-7mBar )

Options

E-Beam Heating for sample and tip
Argon Ion Sputter Source
Metal and Organic Deposition Sources