TOP: Main unit of high-temperature metal evaporator
MIDDLE: Main unit of organic molecular evaporator
BOTTOM: Temperature Controller
Main unit of high-temperature metal evaporator (ME-103C/104C series)
Main unit of organic molecular evaporator (ME-203C/204C series)
Temperature Controller
Model Number: ME- | Number of Elements | Thermo-couple (W-Re) | Shutter Function | Film Thickness Gauge Function | Temperature Controller |
---|---|---|---|---|---|
L104C | 4 | × | × | × | × |
L103CS | 3 | × | ✓ | × | × |
L103CSF | 3 | × | ✓ | ✓ | × |
104C | 4 | ✓ | × | × | × |
104CT | 4 | ✓ | × | × | ✓ |
103CS | 3 | ✓ | ✓ | × | × |
103CST | 3 | ✓ | ✓ | × | ✓ |
103CSF | 3 | ✓ | ✓ | ✓ | × |
103CSFT | 3 | ✓ | ✓ | ✓ | ✓ |
✓: Standardized configuration/ ×: Without equipment
Model Number: ME- | Number of Elements | Thermo-couple (K-type) | Shutter Function | Film Thickness Gauge Function | Temperature Controller |
---|---|---|---|---|---|
204C | 4 | ✓ | × | × | × |
204CT | 4 | ✓ | × | × | ✓ |
203CS | 3 | ✓ | ✓ | × | × |
203CST | 3 | ✓ | ✓ | × | ✓ |
203CSF | 3 | ✓ | ✓ | ✓ | × |
203CSFT | 3 | ✓ | ✓ | ✓ | ✓ |
✓: Standardized configuration ×: Without equipment
TOP: Main Body of Evaporator/ BOTTOM: Main Body of Evaporator with shutter function