Scan Range at RT ( X / Y / Z) = ( 4 / 4 / 0.25 ) μm
Scan Range at 4K ( X / Y / Z) = ( 1.2 / 1.2 / 0.07 ) μm
Coarse Range ±0.5mm in X and Y
2.5K to 80K by counter heating
80K up to room temperature by counter heating
( X / Y / Z) = ( 0 / 0 / 8 ) Tesla
Load Lock Chamber, Preparation Chamber, STM Exchange and Insert Chamber
E-Beam Heating for sample and tip
Argon Ion Sputter Source
Cleaving Unit
Nanonis™ SPM Control System