4-Nano-Probe System for SEM UMP-1000
Features
- This system is installed in SEM stage and measures 4 point local electric conduction in submicron area.
- Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC.
| XY Range | |
|---|---|
| Coarse | ±3 mm in ±150 nm steps |
| Fine | ≤1 μm in 10 nm* steps |
| Z Range | |
| Coarse | ±1.5mm in 150 nm steps |
| Fine | ≤1 μm in 10 nm* steps |
| Sample Size | 10mm × 10mm × 1mm |
| Weight | ≤1000g |
* 0.1nm resolution is possible with optional software.
| Components | H/W/D(cm) Approx. |
|---|---|
| Nano Probe Unit: 1 | 12 × 12 × 4 |
| Controller Electronics: 1 | 222 × 450 × 520 |
| Notebook PC: 1 | A4 size or B5 size |
| Pt:Ir Probe: 1 | – |
| Accessories: 1 | – |