nanoscore tech GmbH

4-Nano-Probe System for SEM UMP-1000

Features

  • This system is installed in SEM stage and measures 4 point local electric conduction in submicron area.
  • Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC.

 

Specifications
XY Range
Coarse ±3 mm in ±150 nm steps
Fine ≤1 μm in 10 nm* steps
Z Range
Coarse ±1.5mm in 150 nm steps
Fine ≤1 μm in 10 nm* steps
Sample Size 10mm × 10mm × 1mm
Weight ≤1000g

* 0.1nm resolution is possible with optional software.

Basic Components
Components H/W/D(cm) Approx.
Nano Probe Unit: 1 12 × 12 × 4
Controller Electronics: 1 222 × 450 × 520
Notebook PC: 1 A4 size or B5 size
Pt:Ir Probe: 1
Accessories: 1