nanoscore tech GmbH

Nano/Micro Rotation Stage UP-200R Series

 Nano/Micro Rotation Stage UP-200R Series

The Nano/Micro Rotation Stage UP-200R Series are small rotation stages developed for applications that require microscopic rotation and position detection in atmospheric and high-vacuum conditions.

Features

  • Compact design allows incorporation into a variety of scanning electron microscopes (SEM) and focused ion beam (FIB) systems. (Contact us for details)
  • Models are also available with optional rotational angle detection.
  • Installing the Unisoku XYZ Three-axis Nano-manipulator/Prober’s Z-stage enables applications that require a XYZ+R (rotation) four-axis stage.
  • Simple operation from a Windows PC.

Primary Applications

  • Rotational operation and angle detection under SEM, FIB, and optical microscopy.
  • Nano/Micro-manipulation and probing combining XYZ operation and rotational operation.

Lineups

Rotation Stage (R)

Consists of stage unit, controller, and control software (PC optional). Rotational angle detection is available as an option.

Model No.
UP-200R…No rotational angle detection function
UP-200RE…With rotational angle detection function

XYZ Three-axis + Rotation (R) Stage

Consists of stage unit, controller, and control software (PC optional). Rotational angle detection is available as an option.

Model No.

  • UP-200UR…No rotational angle detection
  • UP-200URE…With rotational angle detection

Rotation Stage UP-200R* Rotor shape can be modified Nano/Micro Rotation Stage UP-200R Series
Rotation Stage UP-200RE* Rotor shape can be modified Nano/Micro Rotation Stage UP-200R Series
Rotor UP-200UR * Shape of rotor at tip can be modified. No rotational angle detection Nano/Micro Rotation Stage UP-200R Series
XYZ Three-axis + R (Rotation) Four-axis Stage UP-200URE* With rotational angle detection) Nano/Micro Rotation Stage UP-200R Series
Specifications
Model No. UP-200R UP-200RE UP-200UR UP-200URE
Stage Type Rotation Stage XYZ + R (Rotation) 4-axis Stage
Angle Detection No Angle Detection Angle Detection No Angle Detection Angle Detection
Unit (Stage)
Max. Range of Motion: XYZ Coarse (Pulse) Mode XY-axis: >5 mm, Z-axis: >3 mm (Custom orders acceptable)
Max. Range of Motion: XYZ Fine (DC) Mode XYZ-axis: >1μm * Modification (i.e., changes to piezo element) possible by special order.
Max. Range of Motion: Rotation (Pulse) Mode >360°C
Min. Resolution: XYZ Coarse (Pulse) Mode <150 nm * Modification (changes to piezo element) possible by special order-values may vary.
Min. Resolution: XYZ Fine (DC) Mode Variable resolution: Max. Range of Motion in DC Mode/20,000 Guaranteed resolution: Max. Range of Motion in DC Mode/2,000
Min. Resolution: Rotation (Pulse) Mode <0.05°C
Rotation Speed Approximately 30s-120s/1 rotation (variable) * Varies with size/shape of rotor
Detection Angle Reading Resolution <0.25°C (Higher resolution available by special order.) <0.25°C (Higher resolution available by special order.)
Rotary Shaft Eccentricity >100 μm (plus-minus Stand)
Input:Voltage ±150V
Input:Extraction Line 2 (Twisted pair wire)
Input:Connector For D-sub terminal
Rotation Stage Dimensions (mm) Rotor OD: 18 mm dia. Stator OD: 30 mm dia. Rotor OD: 22 mm dia. Stator OD: 22 mm dia. Rotor OD: 17 mm dia. Stator OD: 22 mm dia.
Weight (Not including mounting base plate) <100g <120g <180g <200g
Operating Environment: Vacuum In air & 10-2 ~ 10-6 Pa In air & 10-2 ~ 10-4 Pa In air & 10-2 ~ 10-6 Pa In air & 10-2 ~ 10-4 Pa
Operating Environment: Service Temperature Range 4°C ~ 40°C
Operating Environment: Service Humidity Range 15%-80% * Cannot be used under condensation conditions due to sudden changes in the service environment
Controller
Input Voltage AC100 VAC (50/60 Hz) *If requested prior to shipping, this can be modified to AC110, 115, 120, 220, or 240 V.
Power Consumption Less than 100 VA
Controller Output ±150 V max.
Output Terminal D-sub 9-pin female
Input Terminal USB terminal
Dimensions 213(W) × 370(D) × 100(H) mm
Weight Approx. 6kg
Operating Environment: Service Temperature Range 5°C ~ 40°C
Operating Environment: Service Humidity Range 15% ~ 80% * Cannot be used under condensed conditions due to sudden changes in the service environment.
Accessories
Standard Control Software CD-ROM Windows XP/Vista (32-bit) Single-user licens : 1
Special Connection Cable (USB) PC – Controller (3m): 1
Special Connection Cable (One-side Dsub 15) 1.5m: 1
Optional Requested specifications for Notebook PC for Operation (Supplied or purchased separately by customer)
OS (32-bit version) Windows XP or Vista
USB Port At least one
CD-ROM Drive Required
Memory At least 512 MB * To allow for optimal OS operation.
HDD At least 10 MB available space