Nano/Micro Rotation Stage UP-200R Series
The Nano/Micro Rotation Stage UP-200R Series are small rotation stages developed for applications that require microscopic rotation and position detection in atmospheric and high-vacuum conditions.
Features
- Compact design allows incorporation into a variety of scanning electron microscopes (SEM) and focused ion beam (FIB) systems. (Contact us for details)
- Models are also available with optional rotational angle detection.
- Installing the Unisoku XYZ Three-axis Nano-manipulator/Prober’s Z-stage enables applications that require a XYZ+R (rotation) four-axis stage.
- Simple operation from a Windows PC.
Primary Applications
- Rotational operation and angle detection under SEM, FIB, and optical microscopy.
- Nano/Micro-manipulation and probing combining XYZ operation and rotational operation.
Lineups
Rotation Stage (R)
Consists of stage unit, controller, and control software (PC optional). Rotational angle detection is available as an option.
- Model No.
- UP-200R…No rotational angle detection function
- UP-200RE…With rotational angle detection function
XYZ Three-axis + Rotation (R) Stage
Consists of stage unit, controller, and control software (PC optional). Rotational angle detection is available as an option.
Model No.
- UP-200UR…No rotational angle detection
- UP-200URE…With rotational angle detection
| Rotation Stage UP-200R* Rotor shape can be modified |  |
|---|---|
| Rotation Stage UP-200RE* Rotor shape can be modified | |
| Rotor UP-200UR * Shape of rotor at tip can be modified. No rotational angle detection |  |
| XYZ Three-axis + R (Rotation) Four-axis Stage UP-200URE* With rotational angle detection) |  |
| Model No. | UP-200R | UP-200RE | UP-200UR | UP-200URE |
|---|---|---|---|---|
| Stage Type | Rotation Stage | XYZ + R (Rotation) 4-axis Stage | ||
| Angle Detection | No Angle Detection | Angle Detection | No Angle Detection | Angle Detection |
| Unit (Stage) | ||||
| Max. Range of Motion: XYZ Coarse (Pulse) Mode | – | – | XY-axis: >5 mm, Z-axis: >3 mm (Custom orders acceptable) | |
| Max. Range of Motion: XYZ Fine (DC) Mode | – | – | XYZ-axis: >1μm * Modification (i.e., changes to piezo element) possible by special order. | |
| Max. Range of Motion: Rotation (Pulse) Mode | >360°C | |||
| Min. Resolution: XYZ Coarse (Pulse) Mode | – | – | <150 nm * Modification (changes to piezo element) possible by special order-values may vary. | |
| Min. Resolution: XYZ Fine (DC) Mode | – | – | Variable resolution: Max. Range of Motion in DC Mode/20,000 Guaranteed resolution: Max. Range of Motion in DC Mode/2,000 | |
| Min. Resolution: Rotation (Pulse) Mode | <0.05°C | |||
| Rotation Speed | Approximately 30s-120s/1 rotation (variable) * Varies with size/shape of rotor | |||
| Detection Angle Reading Resolution | – | <0.25°C (Higher resolution available by special order.) | – | <0.25°C (Higher resolution available by special order.) |
| Rotary Shaft Eccentricity | >100 μm (plus-minus Stand) | |||
| Input:Voltage | ±150V | |||
| Input:Extraction Line | 2 (Twisted pair wire) | |||
| Input:Connector | For D-sub terminal | |||
| Rotation Stage Dimensions (mm) | Rotor OD: 18 mm dia. Stator OD: 30 mm dia. | Rotor OD: 22 mm dia. Stator OD: 22 mm dia. | Rotor OD: 17 mm dia. Stator OD: 22 mm dia. | |
| Weight (Not including mounting base plate) | <100g | <120g | <180g | <200g |
| Operating Environment: Vacuum | In air & 10-2 ~ 10-6 Pa | In air & 10-2 ~ 10-4 Pa | In air & 10-2 ~ 10-6 Pa | In air & 10-2 ~ 10-4 Pa |
| Operating Environment: Service Temperature Range | 4°C ~ 40°C | |||
| Operating Environment: Service Humidity Range | 15%-80% * Cannot be used under condensation conditions due to sudden changes in the service environment | |||
| Controller | ||||
| Input Voltage | AC100 VAC (50/60 Hz) *If requested prior to shipping, this can be modified to AC110, 115, 120, 220, or 240 V. | |||
| Power Consumption | Less than 100 VA | |||
| Controller Output | ±150 V max. | |||
| Output Terminal | D-sub 9-pin female | |||
| Input Terminal | USB terminal | |||
| Dimensions | 213(W) × 370(D) × 100(H) mm | |||
| Weight | Approx. 6kg | |||
| Operating Environment: Service Temperature Range | 5°C ~ 40°C | |||
| Operating Environment: Service Humidity Range | 15% ~ 80% * Cannot be used under condensed conditions due to sudden changes in the service environment. | |||
| Accessories | ||||
| Standard Control Software CD-ROM | Windows XP/Vista (32-bit) Single-user licens : 1 | |||
| Special Connection Cable (USB) | PC – Controller (3m): 1 | |||
| Special Connection Cable (One-side Dsub 15) | 1.5m: 1 | |||
| Optional Requested specifications for Notebook PC for Operation (Supplied or purchased separately by customer) | ||||
| OS (32-bit version) | Windows XP or Vista | |||
| USB Port | At least one | |||
| CD-ROM Drive | Required | |||
| Memory | At least 512 MB * To allow for optimal OS operation. | |||
| HDD | At least 10 MB available space | |||