There is a wide range of nano probing tools:
The USM1400-4Probe is a UHV Nano Probe featuring 4 independent STM stages with atomic resolution. A 10nm resolution SEM or a high-resolution optical microscope are the choices for probe navigation to the area of interest.
The Micro 4-P Probe is a UHV SPM stage with a receptacle for Micro Four-Point Probe chips.
Last but not least there are nano positioning units and stage controllers available which can be used for various applications.